Auflistung nach Schlagwort "Direct Simulation Monte Carlo"

Auflistung nach Schlagwort "Direct Simulation Monte Carlo"

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  • Multiple scale modeling of Al2O3 thin film growth in an ion beam sputtering process 
    Turowski, Marcus; Jupé, Marco; Melzig, Thomas; Pflug, Andreas; Ristau, Detlev (Bellingham, WA : S P I E - International Society for Optical Engineering, 2015)
    A multiple scale model approach is presented in order to investigate Al2O3 thin film growth in the framework of an existing Ion Beam Sputtering (IBS) coating process. Therefore, several simulation techniques are combined ...
  • Simulation in thin film technology 
    Turowski, Marcus; Jupé, Marco; Ehlers, Henrik; Melzig, Thomas; Pflug, Andreas; Ristau, Detlev (Bellingham, WA : S P I E - International Society for Optical Engineering, 2015)
    Simulation and modeling find more and more their way into thin film technology. Beside theoretical models for layer design, pre-production design analysis, and real time process control, atomistic simulation techniques ...